首页>
外国专利>
The tip/chip for electron beam spot form measurement and the electron beam spot form measuring method null which uses this
The tip/chip for electron beam spot form measurement and the electron beam spot form measuring method null which uses this
展开▼
机译：电子束斑形测量的尖端/芯片和使用该方法的电子束斑形测量方法无效
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: To provide a chip for measuring the shape of an electron beam spot in which highly efficient alignment is realized between dots and the electron beam spot. ;CONSTITUTION: The chip 20 for measuring the shape of an electron beam spot has a pattern 23 for measuring the shape of the electron beam spot formed on an Si chip substrate 21. The measuring pattern 23 comprises a grid pattern formed by X-direction lines 26-1-26-4 and Y-direction lines 27-1-27-4 made of Ta, and dots 28-1-28-9 in each grid made of Ta. The dots 28-1-28-9 are located at predetermined positions with respect to the lines 26-1-26-4, 27-1-27-4. Each line 26-1-26-4, 27-1-27-4 is constituted to function as a reference position when the dots 28-1-28-9 are searched.;COPYRIGHT: (C)1994,JPO&Japio
展开▼
