首页>
外国专利>
Fabrication based computer aided design system using virtual fabrication techniques
Fabrication based computer aided design system using virtual fabrication techniques
展开▼
机译：使用虚拟制造技术的基于制造的计算机辅助设计系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
A fabrication process based fabrication, modeling and analysis tool that allows the user to accurately design, visualize, simulate, and analyze the design of a micro-electro mechanical (MEMS) or other semiconductor device through a computer aided simulation of its actual fabrication process. The preferred embodiment creates a creates a model of both a device having the desired parameters and attributes and the necessary fabrication steps in the fabrication process to yield that device. The tool is suitable for implementation on existing general purpose computers. The tool involves a method comprising the general steps of, building a Process Table comprised of fabrication process steps, checking each step in the Process Table against a parameter set contained in a database of actual fabrication process steps, visualizing the geometry of a device yielded by performing the process steps in the Process Table, performing an analysis on the device yielded by performing the process steps in the Process Table by applying loads and boundary conditions to the device yielded by performing the process steps in the Process Table, discretizing the device structure, performing one or more methods of electrical, chemical, or mechanical analyses on the discretized structure; and visualizing the results of the analysis in graphical or tabular format. The analysis and discretization methods further employ a method of meshing the structure of the device comprising the steps of, generating a global three- dimensional volume mesh from the model; extracting a global surface mesh from the volume mesh, locating the exposed face surface mesh on the global surface mesh, refining the exposed face surface mesh by removing all non-exposed faces, performing an analysis over the refined exposed face surface mesh, relating the results of the analysis on the refined exposed face surface mesh to the global surface mesh and the global volume mesh.
展开▼
