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Loading process to provide improved vacuum environment

机译:加载过程可改善真空环境

摘要

A pump is used to reduce the pressure in a field emission display package. The package is then filled with a gas or gas mixture, such as nitrogen and hydrogen. The package is then pumped again, to reduce the pressure in the package to the desired pressure and to obtain the desired partial pressure of the gas. Optionally, the process is then repeated, with a gas or gas mixture again inserted into the package and then the pressure reduced with a pump. After pumping, the package may be heated to cause outgassing and to activate a getter. The pumping is performed with a mechanical pump, an ion pump, or a combination of the two types of pumps.
机译:泵用于降低场发射显示器包装中的压力。然后,用气体或气体混合物(例如氮气和氢气)填充包装。然后再次抽吸包装,以将包装中的压力降低至所需压力并获得所需的气体分压。任选地,然后重复该过程,再次将气体或气体混合物插入包装中,然后用泵降低压力。抽气后,包装可能会被加热而导致脱气并激活吸气剂。用机械泵,离子泵或两种泵的组合进行泵送。

著录项

  • 公开/公告号US6093072A

    专利类型

  • 公开/公告日2000-07-25

    原文格式PDF

  • 申请/专利权人 MICRON TECHNOLOGY INC.;

    申请/专利号US19980084673

  • 发明设计人 DAN DYNKA;DAVID A. CATHEY;

    申请日1998-05-26

  • 分类号H01J9/385;H01J9/39;

  • 国家 US

  • 入库时间 2022-08-22 01:36:37

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