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Waveguide-photodetector, method for producing the same, waveguide usable in the waveguide-photodetector, and method for producing the same
Waveguide-photodetector, method for producing the same, waveguide usable in the waveguide-photodetector, and method for producing the same
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机译：波导光电探测器，其制造方法，可用于该波导光电探测器的波导及其制造方法
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摘要
A waveguide-photodetector includes a semiconductor substrate; a waveguide section, provided on the semiconductor substrate, for propagating light; an opto-electric converting section, provided in the semiconductor substrate, for converting the light into an electric signal; and an insulative layer provided between the semiconductor substrate and the waveguide section. The waveguide section includes at least an introducing part for introducing the light to the waveguide section, a coupling part for coupling the light introduced to the waveguide section to the opto-electric converting section, and a propagating part for propagating the light from the introducing part to the coupling part. The insulative layer includes a first region for defining a position and a shape of an impurity diffused region of the opto-electric converting section, a second region which encloses the first region and is thicker than the first region, and a step portion between the first region and the second region. The introducing part, the propagating part and the coupling part of the waveguide section are located on the first region.
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