首页> 外国专利> InAs/GaSb superlattice structure infrared detector fabricated by organometallic vapor phase epitaxy

InAs/GaSb superlattice structure infrared detector fabricated by organometallic vapor phase epitaxy

机译:有机金属气相外延制备的InAs / GaSb超晶格结构红外探测器

摘要

The invention concerns an InAs/GaSb superlattice infrared detector that is prepared on a GaSb or a GaAs substrate by low pressure organometaleic chemical vapor deposition. The thickness of well and barrier modulated in the superlattice is used to control the wavelength of absorption. As the superlattice is sandwiched by the Si-doped InAs layer, the wavelength of absorption is in the 814 m range. As the superlattice is sandwiched by the Zn-doped GaSb layer, the wavelength of absorption is in the 35 m range.
机译:本发明涉及InAs / GaSb超晶格红外探测器,其通过低压有机金属化学气相沉积在GaSb或GaAs衬底上制备。在超晶格中调制的势阱和势垒的厚度用于控制吸收的波长。由于超晶格夹在掺Si的InAs层中,因此吸收的波长在814 m范围内。由于超晶格被Zn掺杂的GaSb层夹在中间,因此吸收的波长在35 m范围内。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号