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Smooth diamond films as low friction, long wear surfaces
Smooth diamond films as low friction, long wear surfaces
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机译：光滑的金刚石膜，低摩擦，长磨损表面
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摘要
An article and method of manufacture of a nanocrystalline diamond film. The nanocrystalline film is prepared by forming a carbonaceous vapor, providing an inert gas containing gas stream and combining the gas stream with the carbonaceous containing vapor. A plasma of the combined vapor and gas stream is formed in a chamber and fragmented carbon species are deposited onto a substrate to form the nanocrystalline diamond film having a root mean square flatness of about 50 nm deviation from flatness in the as deposited state.
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