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Distributed thermojunction type thermopile for conductive and radiant heat fluxmeters has thermal discontinuity zones formed directly below the thermojunctions in a higher thermal conductivity substrate
Distributed thermojunction type thermopile for conductive and radiant heat fluxmeters has thermal discontinuity zones formed directly below the thermojunctions in a higher thermal conductivity substrate
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机译：用于传导和辐射热通量计的分布式热结型热电堆在较高热导率的基板中的热结正下方直接形成热不连续区
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摘要
A distributed thermojunction type thermopile for conductive or radiant heat exchange measurement has thermal discontinuity zones (7) formed directly below the thermojunctions (4) in a higher thermal conductivity substrate (3) especially of silicon. A distributed thermojunction type thermopile, for conductive heat exchange measurement has a thermal discontinuity zone (7) formed directly below each second thermojunction (4) in a higher thermal conductivity substrate (3). Independent claims are also included for the following: (i) a distributed thermojunction type thermopile for radiant heat exchange measurement having a thermal discontinuity zone (7) formed directly below each thermojunction (4) in a higher thermal conductivity substrate (3); (ii) conductive and radiant heat fluxmeters comprising the above thermopile; and (iii) processes for producing the above heat fluxmeters. Preferred Features: Each thermal discontinuity zone (7) is delimited by a cavity (8) in a substrate having a thermal conductivity of -1 W/m.K, especially a silicon substrate (3).
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机译：用于传导或辐射热交换测量的分布式热结型热电堆具有直接在较高导热率的基板（3）（尤其是硅）中的热结（4）的正下方形成的热不连续区（7）。用于传导热交换测量的分布式热结型热电堆具有在较高导热率的基板（3）中的每个第二热结（4）的正下方形成的热不连续区（7）。还包括以下独立权利要求：（i）用于辐射热交换测量的分布式热结型热电堆，其具有在较高导热率的基板（3）中的每个热结（4）的正下方形成的热不连续区（7）; （ii）包括上述热电堆的传导和辐射热通量计; （iii）生产上述热通量计的方法。优选的特征：每个热不连续区（7）由导热系数为 -1 W / m.K的衬底，特别是硅衬底（3）中的空腔（8）界定。
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