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Bonding capillary, especially an ultrasonic ball-wedge bonding capillary, is produced by applying a hard material layer to form a nonstick coating without affecting ultrasonic transmission properties
Bonding capillary, especially an ultrasonic ball-wedge bonding capillary, is produced by applying a hard material layer to form a nonstick coating without affecting ultrasonic transmission properties
Bonding capillary (5) production comprises coating a ceramic base material (10) with a hard material layer (11). Independent claims are also included for the following: (i) a bonding capillary produced by the above process; and (ii) a bonding process using the above bonding capillary. Preferred Features: The hard material layer (11) is a vapor-deposited titanium nitride layer.
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