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NON VOLATILE SINGLE ELECTRON TRANSISTOR MEMORY USING QUANTUM DOT AND METHOD THEREOF, AND SINGLE ELECTRON TRANSISTOR USING QUANTUM DOT AND METHOD THEREOF
NON VOLATILE SINGLE ELECTRON TRANSISTOR MEMORY USING QUANTUM DOT AND METHOD THEREOF, AND SINGLE ELECTRON TRANSISTOR USING QUANTUM DOT AND METHOD THEREOF
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机译:使用量子点的非挥发性单电子晶体管存储器及其方法,以及使用量子点的非挥发性电子晶体管及其方法
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摘要
PURPOSE: A non volatile single electron transistor memory is provided to secure a repeatability and a uniformity of an island by using a quantum dot for precisely controlling the size of the island to a unit of nanometer. CONSTITUTION: A non volatile single electron transistor memory comprises a silicon substrate(100), quantum dots(110) of a predetermined size, a source(120) and a drain(130), and a side gate. A SiO2 oxidation layer(100b) is formed on the silicon substrate. The quantum dots of a predetermined size are separated a predetermined interval from each other on the SiO2 oxidation layer. The source and drain are formed by evaporating a metal on the SiO2 oxidation layer including the quantum dots, having a predetermined number of the quantum dots used as an island, between the source and the drain. The side gate is formed on the SiO2 oxidation layer at a side surface of the source and drain, having a predetermined interval from the source and drain.
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