首页>
外国专利>
PHOTO-DIODE HAVING LIGHTWAVE TUBE WITH 1.3um/1.5um LIGHTWAVE AND METHOD THEREOF
PHOTO-DIODE HAVING LIGHTWAVE TUBE WITH 1.3um/1.5um LIGHTWAVE AND METHOD THEREOF
展开▼
机译：具有1.3um / 1.5um光波的光电二极管的光电二极管及其方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: A method for manufacturing an optic module having a light wave with 1.3um/1.5um is provided to manufacture the optic module with low cost, small size and high tolerant error. CONSTITUTION: The method for manufacturing an optic module having a light wave with 1.3um/1.5um comprises the steps of: depositing sequentially an N-InP layer(74,75), an N-InGaAsP layer(76) and a P-InGaAsP layer(78) on a N-InP substrate(80); exposing the InP layer by deleting the P-InGaAsP layer in one side on the N-InP substrate and the N-InGaAsP layer in the bottom; forming sequentially an N-InGaAs layer(77) and a P-InP layer(77a) on an upper area of the N-InP layer exposed; deleting the photoresist mask; forming a SiN mask exposing a predetermined space between the P-InGaAs layer and the P-InP layer on a predetermined area on an upper area of the P-InGaAs layer and the P-InP layer; etching the exposed P-InGaAsP layer and P-InP layer, and N-InGaAsP layer and N-InGaAs layer at the bottom so that the substrate layer of the N-InP layer; and forming a insulation layer(86) for protecting and anti-reflection on the overall substrate
展开▼
