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ABSOLUTE LASER WAVELENGTH CALIBRATION METHOD USING LIGHT-ABSORPTION LINE OF CARBON ATOM AND MOLECULAR OXYGEN, AND LASER SYSTEM SUBJECT TO ABSOLUTE WAVELENGTH CALIBRATION
ABSOLUTE LASER WAVELENGTH CALIBRATION METHOD USING LIGHT-ABSORPTION LINE OF CARBON ATOM AND MOLECULAR OXYGEN, AND LASER SYSTEM SUBJECT TO ABSOLUTE WAVELENGTH CALIBRATION
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机译：利用碳原子和分子氧的光吸收线进行绝对激光波长标定的方法及受绝对波长标定影响的激光系统
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摘要
PROBLEM TO BE SOLVED: To provide a laser system wherein the absolute wavelength of an excimer laser is accurately and efficiently calibrated. ;SOLUTION: This laser system comprises a discharge chamber 2 filled with a mixed gas containing a laser active material and a trace amount of light-absorbing chemical material. The light-absorption chemical material comprises at least one light-absorption line in the output radiating spectrum of the laser. Output radiation 12 of the laser is narrowed and adjusted within a wide band radiation spectrum of the laser, comprising at least one light-absorption line. The absolute wavelength of narrowed radiation can be calibrated, when the narrowed radiation is adjusted by the light-absorption line. The light-absorbing chemical material is preferably carbon atom or molecular oxygen. The carbon atom or molecular oxygen is provided by introducing a trace amount of organic molecules or molecule comprising oxygen into the discharge chamber 2, in which a laser active material is present first. Then the molecules interact each other in the discharge chamber 2 to generate carbon atoms or molecular oxygens.;COPYRIGHT: (C)2000,JPO
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