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FUNCTION ELEMENT, FUNCTION ELEMENT DISCRIMINATION DEVICE AND FUNCTION ELEMENT DISCRIMINATION METHOD
FUNCTION ELEMENT, FUNCTION ELEMENT DISCRIMINATION DEVICE AND FUNCTION ELEMENT DISCRIMINATION METHOD
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机译：功能要素，功能要素辨别装置及功能要素辨别方法
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摘要
PROBLEM TO BE SOLVED: To provide a function element, a function element discrimination device and a function element discrimination method, capable of discriminating the position on a semiconductor wafer where the function element is formed, concerning the function element taken out from the semiconductor wafer. ;SOLUTION: A discrimination mark, by which the position on a wafer, where for example, a cantilever 30 is formed as a function element, can be specified, is formed on a cantilever 30. Light is irradiated to the discrimination mark by a light source 41, and reflected light 52 is received and converted to an electric signal on a light receiving part 42. The converted electric signal is transmitted to a signal processing part 44 through AMP 43, and the signal processing part 44 recognizes the discrimination mark from the electric signal and discriminates the position on the wafer.;COPYRIGHT: (C)1999,JPO
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