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Planar optical waveguide, planar optical waveguide with Bragg grating, and method of fabricating such a planar optical waveguide
Planar optical waveguide, planar optical waveguide with Bragg grating, and method of fabricating such a planar optical waveguide
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机译：平面光波导，具有布拉格光栅的平面光波导及其制造方法
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摘要
It is known to expose a photosensitive waveguide core to an optical interference pattern which is produced using a phase mask. Precise positioning of the phase mask above the optical waveguide is difficult if several Bragg gratings are to be produced in a confined space. The invention solves the problem of how to produce virtually arbitrarily defined refractive-index gratings in a core of an optical waveguide with high precision without the use of phase masks. To accomplish this, a buffer layer of the optical waveguide, preferably the cladding layer (CLA) , is patterned in such a way that UV laser light directed to the waveguide forms an optical interference pattern in the core (COR), thereby imprinting a Bragg grating. The pattern (GST) in the buffer layer is preferably formed by etching.
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