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Method for providing a piezoelectric substrate and surface acoustic wave device with reduced bulk acoustic wave scattering

机译:提供减小了体声波散射的压电基板的方法和表面声波装置

摘要

A piezoelectric substrate (120) and a method for preparing same. The method includes steps of (i) providing a boule of piezoelectric material, (ii) orienting the boule to Euler angles chosen to provide a boundary condition matched to a partially-metallized surface and (iii) sawing the boule into at least a first slice (120) having first and second surfaces, at least one of the first and second surfaces comprising a planar surface. The method desirably but not essentially further includes steps of (iv) polishing at least one of the first and second surfaces to provide a substantially planar polished surface, (v) disposing a layer of metal on the at least one of the first and second surfaces and (vi) patterning the layer of metal to provide at least one interdigitated pattern (105, 110) comprising an acoustic wave transducer (105, 110), the acoustic wave transducer (105, 110) providing the boundary condition matched to a partially-metallized surface.
机译:压电基板(120)及其制备方法。该方法包括以下步骤:(i)提供压电材料块,(ii)将块定向至欧拉角,选择欧拉角以提供与部分金属化表面匹配的边界条件,以及(iii)将块锯成至少第一片(120)具有第一和第二表面,第一和第二表面中的至少一个包括平坦表面。该方法理想地但不是必须进一步包括以下步骤:(iv)抛光第一和第二表面中的至少一个以提供基本平坦的抛光表面,(v)在第一和第二表面中的至少一个上设置金属层(vi)对金属层进行构图,以提供至少一个包括声波换能器(105、110)的叉指图案(105、110),该声波换能器(105、110)提供与部分波峰匹配的边界条件-金属化表面。

著录项

  • 公开/公告号US5896636A

    专利类型

  • 公开/公告日1999-04-27

    原文格式PDF

  • 申请/专利权人 MOTOROLA INC.;

    申请/专利号US19970787059

  • 发明设计人 DAVID PENUNURI;

    申请日1997-01-22

  • 分类号H01L41/22;

  • 国家 US

  • 入库时间 2022-08-22 02:08:15

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