首页> 外国专利> Method and system for spatial filtering of an extended radiation source with chromatic aberration of imaging optics in single-element detector measurement for monitoring of the extended radiation source

Method and system for spatial filtering of an extended radiation source with chromatic aberration of imaging optics in single-element detector measurement for monitoring of the extended radiation source

机译:在用于监视扩展辐射源的单元素检测器测量中利用成像光学器件的色差对扩展辐射源进行空间滤波的方法和系统

摘要

A method and system is disclosed in which the local variation of an extended radiation source is monitored with single-element detector. The chromatic aberration of the imaging optics induces the different transmittance curves for different wavelengths, and the different shape in the transmittance curve is used as a spatial filter which is multiplied to the chromatic intensity profile of the extended radiation source to detect the local variation in the intensity profile of the extended radiation source. The signal processing of the chromatic signals is implemented to detect the size variation and the environmental effects on the extended radiation source. A fiber is also used for remote operation.
机译:公开了一种方法和系统,其中用单元素检测器监测扩展辐射源的局部变化。成像光学器件的色差会引起不同波长的不同透射率曲线,并且透射率曲线中的不同形状被用作空间滤波器,并与扩展辐射源的色强度分布相乘,以检测光源中的局部变化。扩展辐射源的强度分布。对彩色信号进行信号处理,以检测尺寸变化和对扩展辐射源的环境影响。光纤也用于远程操作。

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