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PROCESS OF MANUFACTURING UPHEAVAL TYPE LITHIUM NIOBATE OPTICAL WAVEGUIDE
PROCESS OF MANUFACTURING UPHEAVAL TYPE LITHIUM NIOBATE OPTICAL WAVEGUIDE
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机译：制造超短波型铌酸锂光学波导的过程
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摘要
The present invention relates to a method for manufacturing a raised lithium niobate optical waveguide. More specifically, the present invention can obtain an etching result with high etching rate and uniformity even at room temperature by a simple process, and can obtain an optical waveguide having a stable refractive index and an electro-optic effect. It relates to a manufacturing method. A method of manufacturing a raised lithium niobate optical waveguide of the present invention includes forming a metal mask on a lithium niobate substrate and forming a proton exchange layer on the substrate by selective proton exchange; Etching the proton exchange layer by wet etching the substrate on which the proton exchange layer is formed with an etching solution; Depositing a proton exchange mask by coating a photoresist on the electrically etched substrate and irradiating light from the bottom of the substrate to selectively photoresist the photoresist and develop the photoresist; And removing the electrometal mask and the proton exchange mask on the metal mask to protonate and heat treat the substrate. According to the method of manufacturing the raised lithium niobate optical waveguide of the present invention, an etching result excellent in high etching rate and uniformity can be obtained even at room temperature by a simple process, and thus an optical waveguide can be manufactured economically in a short time.
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