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FORCE SENSOR, TEMPERATURE SENSOR AND TEMPERATURE/FORCE SENSOR DEVICE
FORCE SENSOR, TEMPERATURE SENSOR AND TEMPERATURE/FORCE SENSOR DEVICE
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机译：力传感器，温度传感器和温度/力传感器设备
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摘要
The force sensor absorbs electrons having a substrate having a movable portion displaceable in response to an applied force or acceleration, an electron emitting portion having a cathode for emitting electrons by the applied potential, and an anode for capturing electrons emitted from the cathode. And control means for controlling the electron trapping efficiency of the anode due to the displacement of the movable portion with respect to the electrons emitted from the cathode, wherein the electron emitting portion and the electron absorbing portion are formed on the surface side of the substrate.
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