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Glass substrate cleaning apparatus for liquid crystal display device and glass substrate cleaning method using the same
Glass substrate cleaning apparatus for liquid crystal display device and glass substrate cleaning method using the same
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机译：液晶显示装置的玻璃基板清洗装置及使用其的玻璃基板清洗方法
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摘要
The present invention discloses a glass substrate cleaning apparatus for a liquid crystal display device and a glass substrate cleaning method using the same for improving adhesion characteristics between a glass substrate and a gate electrode of a thin film transistor.;The disclosed glass substrate cleaning apparatus for a liquid crystal display device includes a cleaning portion for cleaning a glass substrate surface with a cleaning solution, a rinsing portion for rinsing the cleaned glass substrate, a drying portion for drying the rinsed glass substrate, and dried glass. It includes a UV lamp to form an oxide film by irradiating UV rays to the glass material remaining on the substrate surface. In addition, the cleaning method of the glass substrate using the same, washing the glass substrate with a cleaning liquid, rinsing the cleaning liquid present in the cleaned glass substrate, drying the rinsed glass substrate and the dried glass substrate Irradiating UV rays to form an oxide film on the surface of the glass substrate.
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