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Modified illumination system with annular illumination aperture and modified illumination method
Modified illumination system with annular illumination aperture and modified illumination method
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机译：具有环形照明孔的改进的照明系统和改进的照明方法
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摘要
The present invention relates to a modified illumination system and a modified illumination method, and more particularly, to a modified illumination system and a modified illumination method having a ring illumination aperture that can increase the light intensity. Ring illumination aperture according to the present invention is a substrate, a ring portion formed with a plurality of rings in a band shape so as to pass only the light of the incidence component in the center of the substrate, and the light to wrap the ring portion in the donut shape and pass the light 100% It is a light blocking part that wraps the passing part and the light passing part in a donut shape and blocks 100% of light.
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