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Appearance survey instrument null of soldered

机译:外观调查仪器无锡

摘要

PURPOSE: To obtain an external appearance inspection apparatus which can improve the inspection precision of external appearance inspection while eliminating dead angle of laser light and carry out external appearance inspection of soldering condition even if a chip is mounted on a substrate at any rotary angle. ;CONSTITUTION: A laser apparatus 4 to radiate laser light 6 to a substrate 5 from upper side, an optical device 8 to convert the laser light 6 into fan-shaped slit light 6a, and an optical device 11 to convert the fan-shaped light 6a again into slit lights 6b in parallel are provided. Further, a camera 12 to observe the reflected lights 6c of the slit lights 6b in parallel radiated to the substrate 5 from diagonal upper side and a driving means 15 to horizontally rotate the laser apparatus 4 and the camera integrally are provided and thus an soldering condition's external appearance-apparatus is composed for inspecting external appearance in soldered condition.;COPYRIGHT: (C)1993,JPO&Japio
机译:目的:获得一种外观检查装置,即使芯片以任何旋转角度安装在基板上,也可以在消除激光死角的同时提高外观检查的检查精度,并进行焊接条件的外观检查。 ;组成:激光装置4从上侧向基板5辐射激光,光学装置8将激光6转换为扇形狭缝光6a,光学装置11将扇形光转换为扇形狭缝光6a。在图6a中再次提供了平行的狭缝灯6b。此外,设置有用于观察从对角线上侧平行地照射到基板5的狭缝光6b的反射光6c的照相机12,以及用于使激光装置4和照相机一体地水平旋转的驱动装置15,从而具有焊接条件。外观设备,用于检查焊接状态下的外观。;版权所有:(C)1993,日本特许厅

著录项

  • 公开/公告号JP2973606B2

    专利类型

  • 公开/公告日1999-11-08

    原文格式PDF

  • 申请/专利权人 MATSUSHITA DENKI SANGYO KK;

    申请/专利号JP19910172548

  • 发明设计人 TOKURA NOBUSHI;

    申请日1991-07-12

  • 分类号G01B11/24;G01N21/88;H01L21/66;

  • 国家 JP

  • 入库时间 2022-08-22 02:30:55

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