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SAMPLE OBSERVING AND ANALYZING METHOD BY VACUUM SYSTEM OBSERVING AND ANALYZING DEVICE, AND SAMPLE BOX FOR SAME DEVICE
SAMPLE OBSERVING AND ANALYZING METHOD BY VACUUM SYSTEM OBSERVING AND ANALYZING DEVICE, AND SAMPLE BOX FOR SAME DEVICE
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机译：真空系统观察与分析装置的样品观察与分析方法及同一装置的样品盒
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摘要
PROBLEM TO BE SOLVED: To enable highly accurate and high-quality observation and analysis while preventing the oxidization and moisture absorption of a sample in the observation and analysis of a sample such as metal lithium prepared by a sample preparing device and placed in the observa tion room of a vacuum observing analyzing device. ;SOLUTION: In a sample box 20, a lid plate 22 maintains closing air tightness at a recessed sample pocket 23 by the difference between the inner pressure and outer pressure of the pocket 23, and the lid plate 22 can be automatically opened by the energizing force of a spring by the equilibrium between the inner pressure and outer pressure of the pocket 23. The sample box 20 is placed in the glove box 5 of an atmosphere of inert gas of a sample preparing device 2 to house a sample 3 in the pocket 23. Continuously, the inside of the pocket 23 is brought into a vacuum state to set the pocket 23 at a closing hermetic state in which the lid 22 is adhered to the pocket 23. Then the sample box 20 is transferred to the observation room 9 of a vacuum system observing and analyzing device 1 and is set on a sample platform 11, and the observation room is brought into a vacuum state. By this, the lid 22 is brought into an automatically opened state, and the sample 3 in the pocket 23 is irradiated with an electron beam 12 and observed and analyzed characteristically in this observing and analyzing method and the sample box 20.;COPYRIGHT: (C)1999,JPO
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