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Precision positioning control apparatus and precision positioning control method
Precision positioning control apparatus and precision positioning control method
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机译：精密定位控制装置及精密定位控制方法
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摘要
A precision positioning control apparatus includes a coarse positioner, a fine positioner, a displacement totalizer for totaling the displacements of the two positioners, a total displacement detector for producing a total displacement signal, a comparator for producing an error signal, a coarse positioner adjuster for adjusting the error signal and inputting the adjusted signal to the coarse positioner, and fine positioner adjuster for adjusting the error signal and inputting the adjusted signal to the fine positioner. The coarse position adjuster includes a gain element, a transfer element, a limitter, an integrator, a gain adjuster and an adder.
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