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Heterodyne interferometer arrangement with tunable lasers, a heterodyne interferometer, a comparison interferometer and a reference interferometer
Heterodyne interferometer arrangement with tunable lasers, a heterodyne interferometer, a comparison interferometer and a reference interferometer
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机译：带有可调谐激光器的外差式干涉仪装置，外差式干涉仪，比较干涉仪和参考干涉仪
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摘要
The present invention is directed to a heterodyne interferometer arrangement with tunable laser light sources for absolute distance measurement. The phase angle changes which occur in the synthetic interference signals when varying the laser frequencies are recorded and evaluated. The arrangement also enables error-free distance measurement in the event of a change in the mathematical sign of the phase changes due to frequency jitter.
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