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Method for forming a thin carbon overcoat in a magnetic recording medium
Method for forming a thin carbon overcoat in a magnetic recording medium
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机译：在磁记录介质中形成薄碳外涂层的方法
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摘要
A method for forming an overcoat having first and second layers in a magnetic recording medium is described. The first overcoat layer is deposited in a first sputtering chamber where the magnetic means for confining target plasma in the chamber are oriented to retain magnetic- field confinement about the target surface and to produce magnetic field lines between directly confronting portions of the confronting sputtering targets. The second overcoat layer is deposited under a nitrogen- containing atmosphere.
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