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OPTOMECHANICAL DEVICE AND APPLICATION TO INTEGRATED OPTICAL SENSORS
OPTOMECHANICAL DEVICE AND APPLICATION TO INTEGRATED OPTICAL SENSORS
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机译:光学机械装置及其在集成光学传感器中的应用
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摘要
The subject of the invention is an optomechanical device comprising: BR/ - a fixed part (10, 12), and BR/ - a movable part (28) itself comprising a guiding optical structure (34), a first end (30), said fixed, attached to the fixed part, a second end (32), said movable, said movable part being movable in a first direction (y), BR/ - the fixed part comprising N means for collecting light (20, 22), and a multimode coupler (24, 25) facing the optical guiding structure (34) of the mobile part, and for transmitting an optical signal from the latter to the N light collection means. The invention also relates to a sensor containing such an optomechanical device.
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