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OPTOMECHANICAL DEVICE AND APPLICATION TO INTEGRATED OPTICAL SENSORS

机译:光学机械装置及其在集成光学传感器中的应用

摘要

The subject of the invention is an optomechanical device comprising: BR/ - a fixed part (10, 12), and BR/ - a movable part (28) itself comprising a guiding optical structure (34), a first end (30), said fixed, attached to the fixed part, a second end (32), said movable, said movable part being movable in a first direction (y), BR/ - the fixed part comprising N means for collecting light (20, 22), and a multimode coupler (24, 25) facing the optical guiding structure (34) of the mobile part, and for transmitting an optical signal from the latter to the N light collection means. The invention also relates to a sensor containing such an optomechanical device.
机译:本发明的主题是一种光机械装置,其包括:
-固定部件(10、12),和
-可移动部件(28)本身,包括导向光学结构(34),第一端(30),所述固定件,其第二端(32)附接至所述固定件,所述可动件,所述可动件可沿第一方向(y)移动,
-所述固定件包括用于收集光的N个装置(20、22)和面向移动部分的光导结构(34)的多模耦合器(24、25),用于将来自后者的光信号传输到N个光收集装置。本发明还涉及一种包含这种光机械装置的传感器。

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