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Polycrystalline silicon containing base plate for a flow running accuracy of the radiation of the drawing head, the method for manufacturing, flow running accuracy of the radiation of the drawing head provided therewith, and flow running accuracy of the radiation of the drawing apparatus
Polycrystalline silicon containing base plate for a flow running accuracy of the radiation of the drawing head, the method for manufacturing, flow running accuracy of the radiation of the drawing head provided therewith, and flow running accuracy of the radiation of the drawing apparatus
A base plate for a liquid jet recording head, which is provided with electrothermal converter each having a resistor for generating heat energy and a pair of wirings electrically connected to the resistor, is made of a polycrystalline substance. In the surface of the base plate, provided is an oxide layer formed by thermal oxidation and thermal softening. By utilizing such a specific base plate, a long recording head free from warp and bend can be fabricated at a low cost.
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