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Sample analyzer for photo-induced current with the ability of photo-induced current in not - pre-stressed samples to be detected
Sample analyzer for photo-induced current with the ability of photo-induced current in not - pre-stressed samples to be detected
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机译：具有光感应电流的样品分析仪，能够检测未预应力样品中的光感应电流
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摘要
A sample to be measured having a semiconductor integrated circuit having interconnection lines is set on a scanning photoinduced current analyzer with one end of the interconnection line connected to a ground and the other end connected through a current amplifier to the ground. When a laser beam falls on part having a comparatively low thermal conductivity, such as a part having a void, of the interconnection line while the interconnection line is scanned with the laser beam, temperature distribution in the interconnection line changes at the part. The change in temperature distribution produces spontaneous thermoelectromotive force by the Seebeck effect to induce a current. The current amplifier amplifies the induced current, and then an image date converter converts the amplified current into image information in synchronism with the scanning operation of the laser beam. Since the photoinduced current can be measured without supplying a bias current to the sample to be measured, a current image corresponding to the photoinduced current can be formed to determine the position of a void even if the sample to be measured has a high resistance.
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