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process for improving the performance of devices based on amorphous silicon, such as solar cells, obtained by plasma deposition
process for improving the performance of devices based on amorphous silicon, such as solar cells, obtained by plasma deposition
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机译：用于改善通过等离子体沉积获得的基于非晶硅的器件（例如太阳能电池）的性能的方法
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摘要
High quality, stable photovoltaic and electronic amorphous silicon devices which effectively resist light-induced degradation and current-induced degradation, are produced by a special plasma deposition process. Powerful, efficient single and multi-junction solar cells with high open circuit voltages and fill factors and with wider bandgaps, can be economically fabricated by the special plasma deposition process. The preferred process includes relatively low temperature, high pressure, glow discharge of silane in the presence of a high concentration of hydrogen gas.
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