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Form pyrochlore die tungsten oxide formation on the substrate manner and the said pyrochlore die tungsten oxide formation content humidity sensor component
Form pyrochlore die tungsten oxide formation on the substrate manner and the said pyrochlore die tungsten oxide formation content humidity sensor component
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机译：在基板上形成烧绿石模氧化钨的形成及所述烧绿石模氧化钨的含量湿度传感器组件
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摘要
PROBLEM TO BE SOLVED: To provide a humidity sensor element having a wide moisture sensitivity range, capable of being used at a high temp. over a long period of time and prevented from deterioration in the high humidity atmosphere by utilizing pyrrhite type tungsten oxide having a general formula (M2O)xWO3.zH2O as a sensor material. ;SOLUTION: An alumina substrate 21 is immersed in a tungstate soln. and subsequently subjected to hydrothermal reaction to directly form a pyrrhite type tungsten oxide layer on the substrate 21. At first, a pair of comb-shaped gold electrodes 22 (200μm interval) are provided on the substrate 21 by screen printing and, subsequently, M-pyro O3 (wherein M is H+, Ag+, Li+ or NH4+) paste 23 is applied to the substrate 21 by screen printing to preduce a humidity sensor element 20. The paste 23 and the electrode 22 are heat-treated at a temp. lower than 300°C to be dried.;COPYRIGHT: (C)1997,JPO
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