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APPARATUS AND METHOD FOR QUANTITATIVELY ANALYZING X-RAY AND MEDIUM FOR RECORDING X-RAY QUANTITATIVE ANALYSIS PROGRAM
APPARATUS AND METHOD FOR QUANTITATIVELY ANALYZING X-RAY AND MEDIUM FOR RECORDING X-RAY QUANTITATIVE ANALYSIS PROGRAM
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机译：用于对X射线和介质进行定量分析以记录X射线定量分析程序的装置和方法
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摘要
PROBLEM TO BE SOLVED: To simultaneously, accurately quantitatively analyze multi-elements in a short time irrespective of density of elements distributed in a sample. ;SOLUTION: An intensity of a characteristic X-ray 13 generated when emitting an electron beam 4 or X-ray to a sample 3 while scanning it is recorded at each element. A detected element and background are mapped based on it, subjected to a phase analysis, and grouped according to each composition. Further, mapped respective points are quantitatively calculated, and quantitative values of the respective groups are obtained. Further, an area ratio of the respective groups is obtained. Then, the ratio is converted into a weight ratio of each group based on the density of the detected element and the quantitative value of each group.;COPYRIGHT: (C)1998,JPO
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