首页>
外国专利>
The diamond way the DLC film which is produced carbon (DLC) manufacturing method of the film, with that, the applications, electric field emitter array and electric field emitter cathode
The diamond way the DLC film which is produced carbon (DLC) manufacturing method of the film, with that, the applications, electric field emitter array and electric field emitter cathode
展开▼
机译：金刚石法生产碳的DLC膜（DLC）膜的制造方法，及其应用，电场发射器阵列和电场发射器阴极
展开▼
页面导航
摘要
著录项
相似文献
摘要
(57) Abstract This invention comes in contact being the manner which forms the DLC formation which does not contain hydrogen substantially, approximately the sample base substance or the electric field emitter extensively, next, it exposes DLC formation of the thickness 1 - 100nm to the etching plasma which consists of the fluorine gas, furthermore, the hydrogen which is contained between latter processes and in the aforementioned base substance by the chemical etching reaction with the fluorine the process which forms the DLC formation which does not contain hydrogen, it is removed, furthermore, iterates obtaining the DLC film of specified thickness is possible, the above-mentioned manner it regards.
展开▼
