首页> 外国专利> Optical distance sensor for three-dimensional analysis in quality control testing of semiconductor components - uses variation of optical path length and detection of intensity max. provided by photodetector to provide height profile values

Optical distance sensor for three-dimensional analysis in quality control testing of semiconductor components - uses variation of optical path length and detection of intensity max. provided by photodetector to provide height profile values

机译：用于半导体组件质量控制测试中的三维分析的光学距离传感器-使用光程长度的变化和强度最大值的检测。由光电探测器提供以提供高度轮廓值

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摘要

The sensor uses a confocal optical imaging system for determining the distance and height profile values of a three-dimensional surface. At least one point light source is used to scan the surface, with detection of the image beam via at least one confocal photodetector. The length of the optical path between the detector and the imaging system is periodically varied, with the light intensity max. at the photodetector detected via a peak detector, the corresponding optical path length used for determining the height profile value.

机译：该传感器使用共焦光学成像系统确定三维表面的距离和高度轮廓值。至少一个点光源用于扫描表面，并通过至少一个共焦光电探测器检测图像光束。检测器和成像系统之间的光路长度会定期变化，最大光强为。在通过峰值检测器检测到的光电检测器上，用于确定高度轮廓值的相应光程长度。

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公开/公告号DE19524022A1

专利类型
公开/公告日1997-01-09

原文格式PDF
申请/专利权人 SIEMENS AG 80333 MUENCHEN DE;
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申请/专利号DE1995124022
发明设计人 DOEMENS GUENTER DR.-ING. 83607 HOLZKIRCHEN DE;SCHICK ANTON DR.RER.NAT. 84149 VELDEN DE;KOELLENSPERGER PAUL DIPL.-ING. 81475 MUENCHEN DE;
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申请日1995-06-30
分类号G01B11/30;G01B11/14;
国家 DE
入库时间 2022-08-22 03:15:19

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