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PROCESS FOR MANUFACTURING AND CALIBRATING A RULER IN THE NANOMETRE RANGE FOR TECHNICAL APPARATUSES THAT ARE USED FOR HIGH-RESOLUTION OF ULTRA-HIGH RESOLUTION IMAGING OF STRUCTURES
PROCESS FOR MANUFACTURING AND CALIBRATING A RULER IN THE NANOMETRE RANGE FOR TECHNICAL APPARATUSES THAT ARE USED FOR HIGH-RESOLUTION OF ULTRA-HIGH RESOLUTION IMAGING OF STRUCTURES
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机译：在纳米技术范围内制造和校准标尺的过程，该标尺用于高分辨率的结构超高分辨率成像
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摘要
1.1 A Process for Manufacturing and Calibrating a Rulerin the Nanometre Range for Technical Apparatusesthat are Used for High-resolution or Ultra-highResolution2.1 The present invention describes the production andcalibration of a ruler used to calibrate the abovestated technical apparatuses.2.2 At least two different crystalline or amorphousmaterials are used to construct the ruler; theseshould differ appropriately from each are in theircontrast during imaging. These layers of materialare deposited as a sequence of heterolayers on acarrier material, using a suitable materialdeposition process. The heterolayer sequence that isproduced is described experimentally with at leastone analytical method that is sensitive to theindividual layer thicknesses of the heterolayersequence. The data obtained by the analytical methodare evaluated and recorded. By separating theheterolayer sequence in the direction of deposition,it is possible to render the layer structurevisible.2.3 The solution according to the present invention issuitable, in particular, for calibrating technicalapparatuses that are used in raster electronmicroscopy, transmission electron microscopy, orraster probe microscopy (raster power microscopy,raster tunnel microscopy.3.0 Figure 1.
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