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EVALUATING METHOD OF SOLID-STATE TRACK DETECTOR USING IMAGE PROCESSING DEVICE AND EVALUATING METHOD OF REPRODUCIBILITY OF ENERGY OF ION BEAM UTILIZING THE DEVICE AND EVALUATING METHOD
EVALUATING METHOD OF SOLID-STATE TRACK DETECTOR USING IMAGE PROCESSING DEVICE AND EVALUATING METHOD OF REPRODUCIBILITY OF ENERGY OF ION BEAM UTILIZING THE DEVICE AND EVALUATING METHOD
PROBLEM TO BE SOLVED: To measure a stopping power of an ion beam and to evaluate the reproducibility of the energy of the ion beam by a simple method. ;SOLUTION: An ion beam is cast on a solid-state track detector 14 through a staircase meter 13 constituted of an ion beam absorbing material having a different thickness for each partial area on an entrance plane. A surface state of each partial area formed by etching the surface of the solid-state detector is read by an image reading device 15. An image processing device 16 processes information on a read image and digitizes the gray levels of the image.;COPYRIGHT: (C)1997,JPO
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