首页> 外国专利> Strained layer InGaAs quantum well semiconductor laser on GaAs substrate with quantum well-barrier layer interface structure

Strained layer InGaAs quantum well semiconductor laser on GaAs substrate with quantum well-barrier layer interface structure

机译:具有量子阱-势垒层界面结构的GaAs衬底上的应变层InGaAs量子阱半导体激光器

摘要

A semiconductor double heterostructure formed on a GaAs substrate having an off (100) plane slightly tilted toward a predetermined direction, the double heterostructure including an InGaAs quantum well active strained layer sandwiched between potential barrier layers and including an interface between the InGaAs quantum well active strained layer and an upper potential barrier layer grown on the active strained layer, wherein the interface has a periodical ridge-like bunching structure comprising quadrilateral waveform parts and triangular waveform parts, each of the quadrilateral waveform parts comprises a series of a bottom terrace of the just (100) plane, a reverse direction multiple step plane largely tilted from (100) direction toward the opposite direction to the predetermined direction, a top terrace of the just (100) plane and a forward direction multiple step plane largely tilted from (100) direction toward the predetermined direction, each of the triangular waveform parts comprises the just (100) plane terrace and the forward direction multiple step plane largely tilted from (100) direction toward the predetermined direction.
机译:在具有朝着预定方向稍微倾斜的偏斜(100)平面的GaAs衬底上形成的半导体双异质结构,该双异质结构包括夹在势垒层之间的InGaAs量子阱活性应变层,并且包括在InGaAs量子阱活性应变之间的界面层和生长在有源应变层上的上势垒层,其中该界面具有周期性的脊状聚集结构,该结构包括四边形波形部分和三角形波形部分,每个四边形波形部分都包括一系列的底部梯台。 (100)平面,从(100)方向朝与预定方向相反的方向大幅倾斜的反向多步平面,正(100)平面的顶部平台和从(100)大幅倾斜的正向多步平面朝向预定方向的方向,每个三角波形部分com具有正好(100)平面平台和从(100)方向朝向预定方向大幅倾斜的正向多步平面。

著录项

  • 公开/公告号US5530713A

    专利类型

  • 公开/公告日1996-06-25

    原文格式PDF

  • 申请/专利权人 NEC CORPORATION;

    申请/专利号US19950410304

  • 发明设计人 KAZUO FUKAGAI;

    申请日1995-03-24

  • 分类号H01S3/18;

  • 国家 US

  • 入库时间 2022-08-22 03:38:18

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