Dry etching process for gallium arsenide.

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  机译： 相对于砷化铝镓具有优异选择性的砷化镓干法蚀刻工艺

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  机译： 砷化镓的干法刻蚀工艺

• 5. Dry etching process for gallium arsenide [P] . 欧洲知识产权局专利： EP0492951A3 . 1994-05-11

  机译： 砷化镓的干法刻蚀工艺

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