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Experimental vessel for high temperature graphite coated with silicon nitride film (Si_3N_4) or silicon oxide film (SiO_2) and its fabrication method
Experimental vessel for high temperature graphite coated with silicon nitride film (Si_3N_4) or silicon oxide film (SiO_2) and its fabrication method
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机译：氮化硅膜Si_3N_4或氧化硅膜SiO_2的高温石墨实验容器及其制造方法
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摘要
The present invention relates to a graphite test vessel in which graphite is used as a material and a silicon nitride film or a silicon oxide film is coated thereon. The present invention also relates to a method of manufacturing a graphite sheet, comprising the steps of: a) machining a commercially available graphite into a desired shape, b) depositing the graphite in a chemical vapor deposition reactor in a chemical vapor deposition reactor, And c) when the coating operation is completed, the gas atmosphere is adjusted to nitrogen or oxygen depending on the type of the film, and then heat treatment is performed at 600-900C for about 1 hour to remove pinholes that may be present. . The graphite test vessel manufactured according to the present invention is excellent in radiant heat absorbing ability for maximizing the effect of rapid heating when a rapid heating type radiating furnace is used. It is also possible to coat a silicon nitride film or a silicon oxide film with a chemical vapor deposition And it is remarkably improved in terms of performance and price compared with the conventional platinum container and the like.
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