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PRODUCTION OF CORE FILM MATERIAL FOR QUARTZ OPTICAL WAVEGUIDE AND PRODUCTION OF THE CORE FILM
PRODUCTION OF CORE FILM MATERIAL FOR QUARTZ OPTICAL WAVEGUIDE AND PRODUCTION OF THE CORE FILM
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机译：石英光学波导的核心膜材料的生产和核心膜的生产
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摘要
PURPOSE: To provide a method for producing a core film material for quartz optical waveguide highly reliable, extremely low in loss, and with the characteristic stabilized and a method for producing the core film. ;CONSTITUTION: SiCl4 and GeCl4 are subjected to a flame hydrolysis reaction using an oxyhydrogen flame to form a fine-powder porous material 3, the material 3 is sintered, vitrified and solidified, and the peripheral part of the solidified material is removed by a specified amt. to produce the core film material for quartz optical waveguide. Meanwhile, the core film material 12 is vaporized by electron-beam deposition in a vacuum chamber 11 and deposited on a substrate also used as an underclad or on a substrate 15 on which an underclad is formed to produce the quartz optical waveguide core film. In this case, the material 12 is obtained by subjecting SiCl4 and the chloride of a refractive index control element to a flame hydrolysis reaction using an oxyhydrogen flame to form a fine-powder porous material, sintering, vitrifying and solidifying the porous material. Ge is used as the refractive index control element.;COPYRIGHT: (C)1995,JPO
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