首页>
外国专利>
THIN FILM DEFECT INSPECTION METHOD AND INSPECTION DEVICE THEREFOR
THIN FILM DEFECT INSPECTION METHOD AND INSPECTION DEVICE THEREFOR
展开▼
机译：薄膜缺陷检查方法及其检查装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: To accurately detect a thin film defect even when an inspection object is vibrated. ;CONSTITUTION: By using a light source 7 of coherent light for irradiating an inspection object having a light transmissive thin film, an objective lens 10, and a CCD camera 1 for receiving light from the light transmissive thin film, a thin film 9 is irradiated with the coherent light from the light source 7 to form an image of interference light generated by synthesizing thin film obverse boundary surface reflection light and thin film reverse boundary surface reflection light of irradiation light from the light source 7 on the CCD camera 1 through the objective lens 10. Existence of a defect in the thin film 9 is inspected based on existence of information on interference fringes generated in a defective part having film thickness unevenness in an electric main signal of the camera 1. With this constitution, a defect can be inspected even when the inspection object is vibrated, an in-line inspection can be conducted, and even a cylindrical inspection object can be inspected. Also, defect detection with higher accuracy can be attained, and an inspection over the whole area of the inspection object can be conducted. Furthermore, the whole size of an inspection device can be downsized.;COPYRIGHT: (C)1995,JPO
展开▼
