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LIQUID QUALITY MONITORING METHOD FOR HIGH SPECIFIC RESISTANCE LIQUID, LIQUID QUALITY MONITOR THEREOF AND LIQUID QUALITY MONITORING SYSTEM THEREOF
LIQUID QUALITY MONITORING METHOD FOR HIGH SPECIFIC RESISTANCE LIQUID, LIQUID QUALITY MONITOR THEREOF AND LIQUID QUALITY MONITORING SYSTEM THEREOF
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机译：高比电阻液体的液体质量监测方法，其液体质量监测器及其液体质量监测系统
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摘要
PURPOSE: To easily perform low-cost multi-point measurement of liquid quality by forming the part of a tube in contact with high specific resistance liquid by a conductive member electrically insulated from the tube and detecting its charged amount. ;CONSTITUTION: The part of a tube 110 made of an insulating member is replaced by a sensor 111 made of a conductive member such as SUS304 at the ground point (a) of the tube 110. Since the sensor 111 is provided at the position in direct contact with ultrapure water flowing in the tube 110, charge is generated by the flow of the water. Then, the change of the charged amount by the charging is measured at the change of the voltage value applied across a resistor 112 of 100kΩ disposed between the sensor 111 and a ground contact point. When the normal water having a specific resistance of 18MΩcm flows, the voltage value is about -0.3mV. When the purity of the water is decreased, the absolute value of the voltage value has a trend to decrease toward 0mV, and hence when the sensor 111 is used, the purity of the water can be measured to manage the purity of the water.;COPYRIGHT: (C)1996,JPO
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