首页> 外国专利> Source null in order the mass spectrum to analyze the device, and the solid-state sample in order to analyze the continual solid-state sample which is not the times when transformation is caused in the sample holder in order to support the solid-state sample cathode which is used when manner and the plasma which analyze the sample material of solid state are generated, and in the matrix is unified directly

Source null in order the mass spectrum to analyze the device, and the solid-state sample in order to analyze the continual solid-state sample which is not the times when transformation is caused in the sample holder in order to support the solid-state sample cathode which is used when manner and the plasma which analyze the sample material of solid state are generated, and in the matrix is unified directly

机译：为质谱分析设备提供零源，为分析连续的固态样品提供零源，这不是为了支持固态样品而在样品架中引起转化的时间阴极，用于生成方式和用于分析固态样品材料的等离子体，并直接整合到基质中

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PURPOSE: To directly analyze, especially, a non-conductive solid material by keeping high frequency electric potential glow discharge so that an ionized inactive gas sputters a sample material, and then analyzing the sputtered sample material. CONSTITUTION: A sample holder 10 which analyzes many samples rapidly and easily comprises a stainless steel cylinder holder body 12 whose one end is capped with a plate 14 containing an electric connection and a water coolant connection tube, and the opposite end part is surrounded with a cathode attaching plate 16, and a sample 20 is press-inserted in a recessed place 18. In addition, an electrically earthed 'anode' sleeve 24 of stainless steel is attached around the holder body 12. Then, a high frequency electric potential is applied between a sample cathode and an anode to start glow discharge, and while it is so kept that an ionized inactive gas sputters the sample 20, the low discharge ion generated in the holder 10 is, through a six-way cross, introduced in a composite device for mass analysis, and then introduced in an analysis area through an intermediate vacuum area for analysis.

机译：目的：特别是通过保持高频电位辉光放电直接分析非导电固体材料，以使离子化的惰性气体溅射样品，然后分析溅射的样品。构成：能够快速，轻松地分析许多样品的样品架10包括一个不锈钢圆筒架主体12，其一端被一个装有电连接件和冷却水连接管的板14盖住，而另一端则被一个阴极附接板16，将样品20压入凹进处18。此外，将不锈钢接地的“阳极”套管24固定在支架主体12周围。然后，施加高频电位在样品阴极和阳极之间开始辉光放电，并保持电离惰性气体溅射样品20的同时，在支架10中产生的低放电离子通过六向交叉引入复合材料中用于质量分析的设备，然后通过中间真空区域引入分析区域进行分析。

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公开/公告号JPH07113608B2

专利类型
公开/公告日1995-12-06

原文格式PDF
申请/专利权人クレムスン・ユニヴアーシテイ;
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申请/专利号JP19900140133
发明设计人アール・ケネス・マルクス;
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申请日1990-05-31
分类号G01N21/67;G01N27/62;H01J49/12;
国家 JP
入库时间 2022-08-22 03:58:11

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