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Dielectric breakdown prediction and dielectric breakdown life- time prediction using iterative voltage step stressing
Dielectric breakdown prediction and dielectric breakdown life- time prediction using iterative voltage step stressing
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机译：使用迭代电压阶跃应力的介电击穿预测和介电击穿寿命预测
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摘要
An accurate dielectric breakdown prediction method and a prediction method in which accurate time dependent dielectric breakdown (TDDB) characteristics can be obtained on the basis of dielectric breakdown prediction by a step stress method are provided. In this method, dielectric breakdown is predicted on the basis of a plurality of reference currents in accordance with an applied voltage, or a reference current I.sub.cr is varied as the function of the applied voltage. In the step stress TDDB prediction, a Chen-Holland-Hu model or improved Chen- Holland-Hu model is employed. Since TDDB characteristics can be obtained from only dielectric breakdown prediction, this method is advantageous for early reliability prediction.
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