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Quasi-continuous UV light producing excimer laser for photochemical industry, medicine, photolithography

机译:用于光化学,医药,光刻的准连续紫外光准分子激光器

摘要

The laser includes a UV lamp (12), esp. an Excimer lamp, and a feedback resonator (30). The lamp emits quasi-continuous light with an undeformed wave-front in the UV spectrum. This is passed through correction optics to the feedback resonator which stimulates light emission and generates an output. The UV lamp has a rectangular or cylindrical discharge chamber (14) filled with a gas (16) that emits light rays spontaneously through two UV light transmission windows (24). The resonator (30) has a reflective mirror (32) and a decoupling mirror (34) on the same optical axis as the discharge chamber (14) and the transmission windows (24).
机译:激光器包括紫外线灯(12),尤其是。准分子灯和反馈谐振器(30)。灯发出的准连续光在UV光谱中的波前未变形。这通过校正光学器件到达反馈谐振器,该反馈谐振器激发光发射并产生输出。 UV灯具有填充有气体(16)的矩形或圆柱形的放电室(14),该气体通过两个UV光透射​​窗(24)自发地发射光线。谐振器(30)在与放电室(14)和透射窗(24)相同的光轴上具有反射镜(32)和解耦镜(34)。

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