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METHOD FOR PURIFICATION OF EXHAUST GASES OF PLASMA-CHEMICAL PROCESSES
METHOD FOR PURIFICATION OF EXHAUST GASES OF PLASMA-CHEMICAL PROCESSES
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机译:纯化等离子体化学过程中排放气体的方法
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摘要
FIELD: purification of gases. SUBSTANCE: exhaust gases containing nitrogen oxides, carbon oxide, hydrogen fluoride, silicium and sulfur fluorides, oxyfluorides of sulfur and carbon, ozone are cooled and separated against dust. The process is followed by consequent passing through mordenite, activated coal which is impregnated with alkali solution and through solid alkali sorbent. EFFECT: improves efficiency of the method. 1 tbl
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