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METHOD FOR PURIFICATION OF EXHAUST GASES OF PLASMA-CHEMICAL PROCESSES

机译:纯化等离子体化学过程中排放气体的方法

摘要

FIELD: purification of gases. SUBSTANCE: exhaust gases containing nitrogen oxides, carbon oxide, hydrogen fluoride, silicium and sulfur fluorides, oxyfluorides of sulfur and carbon, ozone are cooled and separated against dust. The process is followed by consequent passing through mordenite, activated coal which is impregnated with alkali solution and through solid alkali sorbent. EFFECT: improves efficiency of the method. 1 tbl
机译:领域:气体净化。物质:包含氮氧化物,碳氧化物,氟化氢,硅和氟化硫,硫和碳的氟氧化物,臭氧的废气被冷却并除尘。该过程之后接着通过丝光沸石,用碱溶液浸渍的活性煤和固体碱吸附剂。效果:提高了方法的效率。 1汤匙

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