High aspect ratio metal microstructures and method for preparing the same

• 1. 一种大厚度、高深宽比的全金属沟道型微结构的加工方法 [P] . 中国专利： CN103818873B . 2016.08.31
• 2. 一种大厚度、高深宽比的全金属沟道型微结构的加工方法 [P] . 中国专利： CN103818873A . 2014-05-28
• 3. High aspect ratio metal microstructures and method for preparing the same [P] . 美国专利： US5814414A . 1998-09-29

  机译： 高深宽比的金属微结构及其制备方法

• 4. High aspect ratio microstructure and method of fabricating the same and high aspect ratio microstructure array and method of fabricating the same [P] . 韩国专利： KR101016007B1 . 2011-02-23

  机译： 高深宽比微结构及其制造方法以及高深宽比微结构阵列及其制造方法

• 5. HIGH ASPECT RATIO MICROSTRUCTURE AND METHOD OF FABRICATING THE SAME AND HIGH ASPECT RATIO MICROSTRUCTURE ARRAY AND METHOD OF FABRICATING THE SAME [P] . 世界知识产权组织专利： WO2010002045A1 . 2010-01-07

  机译： 高长宽比微结构及其制造方法高长宽比微结构及其制造方法

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