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METHOD AND DEVICE FOR DETERMINING IMPURITIES IN A GAS BY GAS PHASE CHROMATOGRAPHY AND USE FOR CALIBRATION OF DOPANT IMPURITIES IN SILANE.
METHOD AND DEVICE FOR DETERMINING IMPURITIES IN A GAS BY GAS PHASE CHROMATOGRAPHY AND USE FOR CALIBRATION OF DOPANT IMPURITIES IN SILANE.
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机译：用气相色谱法测定气体中杂质的方法和装置，以及用于校准硅烷中杂质杂质的方法。
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摘要
The device for determining impurities in a gas by gas phase chromatography comprises: … … - a device (2) for cryogenic trapping of the impurities, equipped with a column packed with granules of a product which adsorbs the impurities, means for refrigeration capable of maintaining the column at a low temperature during the passage of the gas carrying impurities and means for reheating with a view to subsequent desorption; … - a first gas phase chromatograph (15) with a view to a preliminary analysis, equipped with a column with a packing 17, 18, 19 for each impurity; … - a device (32) for cryogenic recentring of the impurities, equipped with a capillary column, means for refrigeration capable of maintaining the column at low temperature during the passage of a carrier gas which has passed through the first chromatograph (15) and means for desorption reheating; … and a second gas phase chromatograph (34) equipped with a capillary column 36, a detection device (38) being placed at the exit. …IMAGE…
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