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Prodn. of magnet-optical recording medium, e.g. disk - using multi-layer recording film formed from thin films of at least two or more types which are stacked alternatingly several times on substrate in sputter system
Prodn. of magnet-optical recording medium, e.g. disk - using multi-layer recording film formed from thin films of at least two or more types which are stacked alternatingly several times on substrate in sputter system
The prodn. method is carried out in a series of steps. A compound material target is prepared, which is mfd. from a number of bar shaped targets (13,15), which are arranged side by side. The at least two or more types of the bar shaped targets, correspond to the types of the materials being layered, also to the number of the layers to be stacked on a substrate (25). The sputter is carried out, whilst either the substrate or the compound material target is moved in such a way that the substrate moves in the direction, which is at right angles to the rod shaped targets. The multi-layered recording film is deposited in coincidence with the components of the rod shaped targets. ADVANTAGE - Film deposit and its control are reliably carried out and productivity of film coating is improved.
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