PURPOSE: To provide an inchworm in which micro-displacement is realized with high resolution. ;CONSTITUTION: The inchworm comprises a telescopic body being arranged on an arbitrary surface and opposite ends to be sucked detachably on the surface, wherein the inchworm moves by alternating telescopic operation of the body and detachable suction at the opposite ends. The body is constituted of one or a plurality of series or parallel connected capacitors each having electrodes 101, 102 coupled through a resilient member, a power supply 150 for each capacitor, and a switch 140 for connecting each capacitor with the power supply 150, and the body telescopes through the use of displacement of inter-electrode distance caused by variation of electrostatic power due to charge/discharge of the capacitor.;COPYRIGHT: (C)1993,JPO&Japio
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