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Metal-insulator-metal (MIM) capacitor-around-via structure for a monolithic microwave integrated circuit (MMIC) and method of manufacturing same
Metal-insulator-metal (MIM) capacitor-around-via structure for a monolithic microwave integrated circuit (MMIC) and method of manufacturing same
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机译:用于单片微波集成电路(MMIC)的金属-绝缘体-金属(MIM)绕电容器结构及其制造方法
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摘要
A metal-insulator-metal (MIM) capacitor for monolithic microwave integrated circuit applications of the capacitoraround-via type having a bottom plate 36, a dielectric 40, and a top plate 44 which substantially surround, but do not physically overlay, via hole 32 and provide a low- inductance connection between a frontside MIM capacitor and a backside ground plane.
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