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Ferromagnetic target for magnetron electrode - has first part between north and south poles of permanent magnet and second part opposite poles
Ferromagnetic target for magnetron electrode - has first part between north and south poles of permanent magnet and second part opposite poles
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机译：磁控管电极的铁磁靶-在永磁体的南北极之间具有第一部分，在相反极处具有第二部分
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摘要
The ferromagnetic target consists of two parts and at least one permanent magnet. The first target part (22) is fitted between the north and south pole of the permanent magnet (12, 13) while the second target part (25, 26) is located opposite to the north or south pole of the permanent magnet, overlapping the outer edge region of the first part. Pref. the permanent magnet north (13) and its spaced south pole (12) are aligned onto the second target part, with the permanent magnet set on a yoke (11). The latter may have a recess, into which protrudes a head (14) of a spacer (15). The yoke may have a pole shoe and may be movable within an electrode trough (8). USE/ADVANTAGE - For magnetron sputtering, with simple design and without need for five individual targets.
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